Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography

Koichi Awazu*, Makoto Fujimaki, Xiaomin Wang, Akihide Sai, Yoshimichi Ohki

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds