Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure

K. Kawai, F. Yamaguchi, A. Nakahara, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    We propose a fabrication method of vertical and high-aspect-ratio microfluidic device which is made of borosilicate glass. Glass microfluidic devices have high demand because of its chemical stability, good bio compatibility, and high optical transparency. We realized vertical glass microwells of 25 μm in diameter and 50 μm in depth(aspect ratio: 2), and micropillars of 3 μm in diameter and 25 μm in height (aspect ratio: ≈ 8). We also realized microfluidic device with pillars in the microchannel.

    Original languageEnglish
    Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
    Pages1193-1195
    Number of pages3
    Volume2
    Publication statusPublished - 2010
    Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen
    Duration: 2010 Oct 32010 Oct 7

    Other

    Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
    CityGroningen
    Period10/10/310/10/7

    Fingerprint

    Borosilicate glass
    Microfluidics
    Molding
    Aspect ratio
    Fabrication
    Glass
    Silicon
    Chemical stability
    Microchannels
    Biocompatibility
    Transparency

    Keywords

    • Borosilicate glass
    • Glass molding
    • High-aspect ratio
    • Thermal molding

    ASJC Scopus subject areas

    • Control and Systems Engineering

    Cite this

    Kawai, K., Yamaguchi, F., Nakahara, A., & Shoji, S. (2010). Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (Vol. 2, pp. 1193-1195)

    Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. / Kawai, K.; Yamaguchi, F.; Nakahara, A.; Shoji, Shuichi.

    14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. Vol. 2 2010. p. 1193-1195.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Kawai, K, Yamaguchi, F, Nakahara, A & Shoji, S 2010, Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. vol. 2, pp. 1193-1195, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Groningen, 10/10/3.
    Kawai K, Yamaguchi F, Nakahara A, Shoji S. Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. Vol. 2. 2010. p. 1193-1195
    Kawai, K. ; Yamaguchi, F. ; Nakahara, A. ; Shoji, Shuichi. / Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. Vol. 2 2010. pp. 1193-1195
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