Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure

K. Kawai, F. Yamaguchi, A. Nakahara, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We propose a fabrication method of vertical and high-aspect-ratio microfluidic device which is made of borosilicate glass. Glass microfluidic devices have high demand because of its chemical stability, good bio compatibility, and high optical transparency. We realized vertical glass microwells of 25 μm in diameter and 50 μm in depth(aspect ratio: 2), and micropillars of 3 μm in diameter and 25 μm in height (aspect ratio: ≈ 8). We also realized microfluidic device with pillars in the microchannel.

Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages1193-1195
Number of pages3
Publication statusPublished - 2010 Dec 1
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: 2010 Oct 32010 Oct 7

Publication series

Name14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume2

Conference

Conference14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
CountryNetherlands
CityGroningen
Period10/10/310/10/7

Keywords

  • Borosilicate glass
  • Glass molding
  • High-aspect ratio
  • Thermal molding

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Kawai, K., Yamaguchi, F., Nakahara, A., & Shoji, S. (2010). Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1193-1195). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).