@inproceedings{049bb4693def4453af2dbb5cdb8d0217,
title = "Fabrication of vertical and high-aspect-ratio glass microfluidic device by borosilicate glass molding to silicon structure",
abstract = "We propose a fabrication method of vertical and high-aspect-ratio microfluidic device which is made of borosilicate glass. Glass microfluidic devices have high demand because of its chemical stability, good bio compatibility, and high optical transparency. We realized vertical glass microwells of 25 μm in diameter and 50 μm in depth(aspect ratio: 2), and micropillars of 3 μm in diameter and 25 μm in height (aspect ratio: ≈ 8). We also realized microfluidic device with pillars in the microchannel.",
keywords = "Borosilicate glass, Glass molding, High-aspect ratio, Thermal molding",
author = "K. Kawai and F. Yamaguchi and A. Nakahara and S. Shoji",
year = "2010",
month = dec,
day = "1",
language = "English",
isbn = "9781618390622",
series = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",
pages = "1193--1195",
booktitle = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",
note = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 ; Conference date: 03-10-2010 Through 07-10-2010",
}