Fabrication of zero-mode waveguide by ultraviolet nanoimprint lithography lift-off process

Junichi Wada, Shou Ryu, Yuji Asano, Taro Ueno, Takashi Funatsu, Takao Yukawa, Jun Mizuno, Takashi Tanii

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7 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy