Fabrication of ZnO channel waveguides for nonlinear optical applications

Edgar Yoshio Morales Teraoka, Tomohiro Kita, Atsushi Tsukazaki, Masashi Kawasaki, Hirohito Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a fabrication procedure for ZnO channel waveguides intended for nonlinear optical applications. Ar ion milling was used to etch the single crystal thin film samples, and the effects of bias power, chamber pressure and Ar flow rate were investigated, finding optimal parameters for waveguide fabrication. The effect of sidewall roughness was estimated by comparing the results of cut-back measurements and an analytical model. We show an easy and effective method for the fabrication of ZnO channel waveguides.

Original languageEnglish
Title of host publicationOxide-Based Materials and Devices II
Volume7940
DOIs
Publication statusPublished - 2011 Apr 27
Externally publishedYes
EventOxide-Based Materials and Devices II - San Francisco, CA, United States
Duration: 2011 Jan 232011 Jan 26

Other

OtherOxide-Based Materials and Devices II
CountryUnited States
CitySan Francisco, CA
Period11/1/2311/1/26

Fingerprint

Waveguide
Fabrication
Waveguides
waveguides
fabrication
pressure chambers
Optimal Parameter
Single Crystal
Roughness
Flow Rate
Analytical Model
Thin Films
Analytical models
roughness
flow velocity
Surface roughness
Flow rate
Single crystals
Ions
Thin films

Keywords

  • Ar ion milling
  • optical waveguides
  • ZnO

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Morales Teraoka, E. Y., Kita, T., Tsukazaki, A., Kawasaki, M., & Yamada, H. (2011). Fabrication of ZnO channel waveguides for nonlinear optical applications. In Oxide-Based Materials and Devices II (Vol. 7940). [79401F] https://doi.org/10.1117/12.874439

Fabrication of ZnO channel waveguides for nonlinear optical applications. / Morales Teraoka, Edgar Yoshio; Kita, Tomohiro; Tsukazaki, Atsushi; Kawasaki, Masashi; Yamada, Hirohito.

Oxide-Based Materials and Devices II. Vol. 7940 2011. 79401F.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Morales Teraoka, EY, Kita, T, Tsukazaki, A, Kawasaki, M & Yamada, H 2011, Fabrication of ZnO channel waveguides for nonlinear optical applications. in Oxide-Based Materials and Devices II. vol. 7940, 79401F, Oxide-Based Materials and Devices II, San Francisco, CA, United States, 11/1/23. https://doi.org/10.1117/12.874439
Morales Teraoka EY, Kita T, Tsukazaki A, Kawasaki M, Yamada H. Fabrication of ZnO channel waveguides for nonlinear optical applications. In Oxide-Based Materials and Devices II. Vol. 7940. 2011. 79401F https://doi.org/10.1117/12.874439
Morales Teraoka, Edgar Yoshio ; Kita, Tomohiro ; Tsukazaki, Atsushi ; Kawasaki, Masashi ; Yamada, Hirohito. / Fabrication of ZnO channel waveguides for nonlinear optical applications. Oxide-Based Materials and Devices II. Vol. 7940 2011.
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