Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

Original languageEnglish
Title of host publication16th International Conference on Nanotechnology - IEEE NANO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages795-798
Number of pages4
ISBN (Electronic)9781509039142
DOIs
Publication statusPublished - 2016 Nov 21
Event16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Duration: 2016 Aug 222016 Aug 25

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
CountryJapan
CitySendai
Period16/8/2216/8/25

Fingerprint

Fluidic devices
fluidics
Focused ion beams
ion beams
Fabrication
fabrication
Experiments

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

Cite this

Nozaki, Y., Kanai, T., Matsuo, A., Tanaka, D., Yuito, I., Takeuchi, T., ... Shoji, S. (2016). Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 795-798). [7751484] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751484

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. / Nozaki, Yoshito; Kanai, T.; Matsuo, A.; Tanaka, Daiki; Yuito, Isamu; Takeuchi, Teruaki; Sekiguchi, Tetsushi; Shoji, Shuichi.

16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 795-798 7751484.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nozaki, Y, Kanai, T, Matsuo, A, Tanaka, D, Yuito, I, Takeuchi, T, Sekiguchi, T & Shoji, S 2016, Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751484, Institute of Electrical and Electronics Engineers Inc., pp. 795-798, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751484
Nozaki Y, Kanai T, Matsuo A, Tanaka D, Yuito I, Takeuchi T et al. Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. In 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 795-798. 7751484 https://doi.org/10.1109/NANO.2016.7751484
Nozaki, Yoshito ; Kanai, T. ; Matsuo, A. ; Tanaka, Daiki ; Yuito, Isamu ; Takeuchi, Teruaki ; Sekiguchi, Tetsushi ; Shoji, Shuichi. / Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 795-798
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