Feasibility study of all-SiC pressure sensor fabrication without deep etching

Fengwen Mu, Yechao Sun, Haiping Shang, Yinghui Wang, Tadatomo Suga, Weibing Wang, Dapeng Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science

Chemical Compounds