Abstract
SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.
| Original language | English |
|---|---|
| Title of host publication | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
| Publisher | IEEE Computer Society |
| ISBN (Electronic) | 9781538633830 |
| DOIs | |
| Publication status | Published - 2017 Oct 31 |
| Event | 2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9 |
Other
| Other | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
|---|---|
| Country | United States |
| City | Washington |
| Period | 17/9/6 → 17/9/9 |
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ASJC Scopus subject areas
- Acoustics and Ultrasonics
Cite this
Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. / Takamura, Yuta; Takayanagi, Shinji; Matsukawa, Mami; Ishida, Chizu; Yanagitani, Takahiko.
2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8091911.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor
AU - Takamura, Yuta
AU - Takayanagi, Shinji
AU - Matsukawa, Mami
AU - Ishida, Chizu
AU - Yanagitani, Takahiko
PY - 2017/10/31
Y1 - 2017/10/31
N2 - SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.
AB - SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.
UR - http://www.scopus.com/inward/record.url?scp=85039429893&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85039429893&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2017.8091911
DO - 10.1109/ULTSYM.2017.8091911
M3 - Conference contribution
AN - SCOPUS:85039429893
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
ER -