Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Yuta Takamura, Shinji Takayanagi, Mami Matsukawa, Chizu Ishida, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.

    Original languageEnglish
    Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
    PublisherIEEE Computer Society
    ISBN (Electronic)9781538633830
    DOIs
    Publication statusPublished - 2017 Oct 31
    Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    Duration: 2017 Sep 62017 Sep 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States
    CityWashington
    Period17/9/617/9/9

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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  • Cite this

    Takamura, Y., Takayanagi, S., Matsukawa, M., Ishida, C., & Yanagitani, T. (2017). Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091911] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091911