Abstract
Recently, it was shown that heavily doped AlN film possess the high piezoelectricity by Akiyama et al [1]. On the other hand, SAW devices were widely used as filters and sensors. Among them, SAW in ScAlN film is attracting a lot of attention because this SAW devices have high electromechanical coupling coefficient K2. We analyzed the K2 value in Sc0.4Al0.6N was increased by c-axis tilted angle θ becoming bigger [2]. In this study, changing the angle of c-axis tilted ScAlN films, we have tried to improve the K2 value of SAWs in c-axis tilted ScAlN/R-sapphire.
Original language | English |
---|---|
Title of host publication | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
Publisher | IEEE Computer Society |
ISBN (Electronic) | 9781538633830 |
DOIs | |
Publication status | Published - 2017 Oct 31 |
Event | 2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9 |
Other
Other | 2017 IEEE International Ultrasonics Symposium, IUS 2017 |
---|---|
Country/Territory | United States |
City | Washington |
Period | 17/9/6 → 17/9/9 |
ASJC Scopus subject areas
- Acoustics and Ultrasonics