Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices

Shohei Tokuda, Shinji Takayanagi, Mami Matsukawa, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Fingerprint

    Dive into the research topics of 'Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices'. Together they form a unique fingerprint.

    Physics & Astronomy