Film properties and photoluminescence characteristics of hydrogenated amorphous silicon nanoball films fabricated using Ar/H2 mixture gas plasma

Yosuke Motoyama, Isamu Kato, Ryouhei Saito

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Film properties and photoluminescence characteristics of hydrogenated amorphous silicon nanoball films fabricated using Ar/H<sub>2</sub> mixture gas plasma'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy