TY - JOUR
T1 - Fine patterning of inkjet-printed single-walled carbon-nanotube thin-film transistors
AU - Nobusa, Yuki
AU - Takagi, Yuki
AU - Gocho, Shota
AU - Matsuzaki, Satoki
AU - Yanagi, Kazuhiro
AU - Takenobu, Taishi
PY - 2012/6
Y1 - 2012/6
N2 - We fabricated single-walled carbon nanotube (SWCNT) thin-films via the combination of inkjet printing and site-selective deposition based on the patterning of self-assembled monolayers (SAMs) through an optical lithography mask. Previously, we patterned SWCNT films by ultraviolet light irradiation onto SAMs through metal masks, and the minimum film size achieved was 90 μm wide. In this study, we succeeded in achieving a width of 13 μm using SAMs and optical lithography masks, thus improving the performance limit of SWCNT printed electronics.
AB - We fabricated single-walled carbon nanotube (SWCNT) thin-films via the combination of inkjet printing and site-selective deposition based on the patterning of self-assembled monolayers (SAMs) through an optical lithography mask. Previously, we patterned SWCNT films by ultraviolet light irradiation onto SAMs through metal masks, and the minimum film size achieved was 90 μm wide. In this study, we succeeded in achieving a width of 13 μm using SAMs and optical lithography masks, thus improving the performance limit of SWCNT printed electronics.
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U2 - 10.1143/JJAP.51.06FD15
DO - 10.1143/JJAP.51.06FD15
M3 - Article
AN - SCOPUS:84863315403
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 6 PART 2
M1 - 06FD15
ER -