Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2

Tomoyuki Yamamoto; Chikai Sato; Masato Mogi; Isao Tanaka; Hirohiko Adachi

doi:10.1016/j.elspec.2003.12.001

Fine structure analysis of Si KL_2,3V Auger spectra of Si, SiC and SiO₂

Tomoyuki Yamamoto^*, Chikai Sato, Masato Mogi, Isao Tanaka, Hirohiko Adachi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

High-resolution Si KL_2,3V Auger spectra of Si, SiC and SiO ₂ are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL _2,3V Auger spectra of Si, SiC and SiO₂ observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.

Original language	English
Pages (from-to)	21-25
Number of pages	5
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	135
Issue number	1
DOIs	https://doi.org/10.1016/j.elspec.2003.12.001
Publication status	Published - 2004 Mar
Externally published	Yes

Keywords

Core-hole effect
Electronic structure
First-principles calculation
KLV Auger spectrum

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

Access to Document

10.1016/j.elspec.2003.12.001

Cite this

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title = "Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2",

abstract = "High-resolution Si KL2,3V Auger spectra of Si, SiC and SiO 2 are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL 2,3V Auger spectra of Si, SiC and SiO2 observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.",

keywords = "Core-hole effect, Electronic structure, First-principles calculation, KLV Auger spectrum",

author = "Tomoyuki Yamamoto and Chikai Sato and Masato Mogi and Isao Tanaka and Hirohiko Adachi",

note = "Funding Information: The authors would like to thank Drs. Y. Shichi and Y. Inoue of NISSAN ARC LTD. for their fruitful discussions. This work was partially supported by the Computational Materials Science Unit in Kyoto University by the Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT).",

year = "2004",

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doi = "10.1016/j.elspec.2003.12.001",

language = "English",

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journal = "Journal of Electron Spectroscopy and Related Phenomena",

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T1 - Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2

AU - Yamamoto, Tomoyuki

AU - Sato, Chikai

AU - Mogi, Masato

AU - Tanaka, Isao

AU - Adachi, Hirohiko

N1 - Funding Information: The authors would like to thank Drs. Y. Shichi and Y. Inoue of NISSAN ARC LTD. for their fruitful discussions. This work was partially supported by the Computational Materials Science Unit in Kyoto University by the Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT).

PY - 2004/3

Y1 - 2004/3

N2 - High-resolution Si KL2,3V Auger spectra of Si, SiC and SiO 2 are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL 2,3V Auger spectra of Si, SiC and SiO2 observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.

AB - High-resolution Si KL2,3V Auger spectra of Si, SiC and SiO 2 are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL 2,3V Auger spectra of Si, SiC and SiO2 observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.

KW - Core-hole effect

KW - Electronic structure

KW - First-principles calculation

KW - KLV Auger spectrum

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