Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2

Tomoyuki Yamamoto, Chikai Sato, Masato Mogi, Isao Tanaka, Hirohiko Adachi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


High-resolution Si KL2,3V Auger spectra of Si, SiC and SiO 2 are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL 2,3V Auger spectra of Si, SiC and SiO2 observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.

Original languageEnglish
Pages (from-to)21-25
Number of pages5
JournalJournal of Electron Spectroscopy and Related Phenomena
Issue number1
Publication statusPublished - 2004 Mar
Externally publishedYes


  • Core-hole effect
  • Electronic structure
  • First-principles calculation
  • KLV Auger spectrum

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry


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