Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2

Tomoyuki Yamamoto, Chikai Sato, Masato Mogi, Isao Tanaka, Hirohiko Adachi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

High-resolution Si KL2,3V Auger spectra of Si, SiC and SiO 2 are measured to investigate changes in the electronic structure of the valence band in these materials. Significant differences between the lineshapes of these spectra are observed. First-principles electronic structure calculations are also carried out, which reproduce the lineshapes of the KL 2,3V Auger spectra of Si, SiC and SiO2 observed experimentally. The core-hole effects on the theoretical spectral lineshapes are also taken into account in the present calculations.

Original languageEnglish
Pages (from-to)21-25
Number of pages5
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume135
Issue number1
DOIs
Publication statusPublished - 2004 Mar
Externally publishedYes

Fingerprint

Electronic structure
fine structure
Valence bands
electronic structure
valence
high resolution

Keywords

  • Core-hole effect
  • Electronic structure
  • First-principles calculation
  • KLV Auger spectrum

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics
  • Surfaces and Interfaces

Cite this

Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2 . / Yamamoto, Tomoyuki; Sato, Chikai; Mogi, Masato; Tanaka, Isao; Adachi, Hirohiko.

In: Journal of Electron Spectroscopy and Related Phenomena, Vol. 135, No. 1, 03.2004, p. 21-25.

Research output: Contribution to journalArticle

Yamamoto, Tomoyuki ; Sato, Chikai ; Mogi, Masato ; Tanaka, Isao ; Adachi, Hirohiko. / Fine structure analysis of Si KL2,3V Auger spectra of Si, SiC and SiO2 In: Journal of Electron Spectroscopy and Related Phenomena. 2004 ; Vol. 135, No. 1. pp. 21-25.
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