Flexible tactile sensor for shear stress measurement using transferred sub-μm-thick Si piezoresistive cantilevers

Kentaro Noda*, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Flexible tactile sensor for shear stress measurement using transferred sub-μm-thick Si piezoresistive cantilevers'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds