Formation of polycrystalline β-FeSi2 layers by ion-implantation and their optical properties

Hirofumi Kakemoto*, Hiroshi Katsumata, Takeaki Takada, Yu Shin Tsai, Masataka Hasegawa, Shiro Sakuragi, Naoto Kobayashi, Yunosuke Makita, Takeyo Tsukamoto, Shin Ichiro Uekusa

*Corresponding author for this work

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Engineering & Materials Science

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