Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Hironobu Sato, Seiki Ito, Kenji Tajima, Norimune Orimoto, Shuichi Shoji

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

Original languageEnglish
Pages (from-to)693-696
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2004 Jul 19
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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