Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Hironobu Sato, Seiki Ito, Kenji Tajima, Norimune Orimoto, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

    Original languageEnglish
    Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    Pages693-696
    Number of pages4
    Publication statusPublished - 2004
    Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
    Duration: 2004 Jan 252004 Jan 29

    Other

    Other17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
    CountryNetherlands
    CityMaastricht
    Period04/1/2504/1/29

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    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering
    • Control and Systems Engineering

    Cite this

    Sato, H., Ito, S., Tajima, K., Orimoto, N., & Shoji, S. (2004). Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 693-696)