Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding

R. Yamamoto, K. Sueyoshi, K. Otsuka, T. Kasahara, A. Nakahara, Donghyun Yoon, Jun Mizuno, Tetsushi Sekiguchi, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140°C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages418-421
Number of pages4
DOIs
Publication statusPublished - 2013
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou
Duration: 2013 Apr 72013 Apr 10

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CitySuzhou
Period13/4/713/4/10

    Fingerprint

Keywords

  • Au microdot array
  • dielectrophoresis
  • low temperature silane coupling bonding
  • microchip electrophoresis
  • SU-8 electron beam lithography

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

Cite this

Yamamoto, R., Sueyoshi, K., Otsuka, K., Kasahara, T., Nakahara, A., Yoon, D., Mizuno, J., Sekiguchi, T., & Shoji, S. (2013). Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 418-421). [6559762] https://doi.org/10.1109/NEMS.2013.6559762