Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding

R. Yamamoto*, K. Sueyoshi, K. Otsuka, T. Kasahara, A. Nakahara, D. H. Yoon, J. Mizuno, T. Sekiguchi, S. Shoji

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140°C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages418-421
Number of pages4
DOIs
Publication statusPublished - 2013 Sep 2
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: 2013 Apr 72013 Apr 10

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Country/TerritoryChina
CitySuzhou
Period13/4/713/4/10

Keywords

  • Au microdot array
  • SU-8 electron beam lithography
  • dielectrophoresis
  • low temperature silane coupling bonding
  • microchip electrophoresis

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

Fingerprint

Dive into the research topics of 'Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding'. Together they form a unique fingerprint.

Cite this