GaN lateral overgrowth by hydride vapor phase epitaxy through nanometer-size channels fabricated with nanoimprint lithography

Akira Usui, Toshiharu Matsueda, Hiroki Goto, Haruo Sunakawa, Yasuharu Fujiyama, Yujiro Ishihara, Akiko Okada, Shuichi Shoji, Atsushi A. Yamaguchi, Hiromi Nishihara, Hidetoshi Shinohara, Hiroshi Goto, Jun Mizuno

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10 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy