Abstract
High-purity silicas synthesized by various manufacturing methods were studied by electron-spin resonance after being irradiated by ArF excimer laser (6.4 eV) at room temperature. Ee centers (?Si) are induced in all samples, while nonbridging oxygen hole centers (?Si-O) appear only in oxygen-surplus silicas and in a sample which has an absorption band at 5.1 eV. The concentration of Ee centers varies from sample to sample, ranging between 1014 and 1016 spins/cm3 for the exposure at the average power density of 28 mJ/cm2 per pulse at 15 Hz for 1 h. The sample dependence regarding the species and concentrations of photoinduced defects is well explained in terms of transformation of preexisting precursors to paramagnetic defects through a two-photon-absorption process.
Original language | English |
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Pages (from-to) | 7828-7834 |
Number of pages | 7 |
Journal | Physical Review B |
Volume | 41 |
Issue number | 11 |
DOIs | |
Publication status | Published - 1990 Jan 1 |
ASJC Scopus subject areas
- Condensed Matter Physics