Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Takahiko Yanagitani, Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara, Morito Akiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

28 Citations (Scopus)

Abstract

Giant shear mode electromechanical coupling coeficient k15' of 0.32 (k15 210 %) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600 C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Pages2095-2098
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Fingerprint

coupling coefficients
shear
sensors
liquids
crystals

Keywords

  • AlN film
  • BAW resonator
  • Electromechanical coupling coefficient
  • FBAR
  • ScAlN film
  • TCF
  • Thickness shear mode

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Yanagitani, T., Arakawa, K., Kano, K., Teshigahara, A., & Akiyama, M. (2010). Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. In Proceedings - IEEE Ultrasonics Symposium (pp. 2095-2098). [5935791] https://doi.org/10.1109/ULTSYM.2010.5935791

Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. / Yanagitani, Takahiko; Arakawa, Kazuki; Kano, Kazuhiko; Teshigahara, Akihiko; Akiyama, Morito.

Proceedings - IEEE Ultrasonics Symposium. 2010. p. 2095-2098 5935791.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yanagitani, T, Arakawa, K, Kano, K, Teshigahara, A & Akiyama, M 2010, Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. in Proceedings - IEEE Ultrasonics Symposium., 5935791, pp. 2095-2098, 2010 IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 10/10/11. https://doi.org/10.1109/ULTSYM.2010.5935791
Yanagitani T, Arakawa K, Kano K, Teshigahara A, Akiyama M. Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. In Proceedings - IEEE Ultrasonics Symposium. 2010. p. 2095-2098. 5935791 https://doi.org/10.1109/ULTSYM.2010.5935791
Yanagitani, Takahiko ; Arakawa, Kazuki ; Kano, Kazuhiko ; Teshigahara, Akihiko ; Akiyama, Morito. / Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. Proceedings - IEEE Ultrasonics Symposium. 2010. pp. 2095-2098
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