Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Takahiko Yanagitani; Kazuki Arakawa; Kazuhiko Kano; Akihiko Teshigahara; Morito Akiyama

doi:10.1109/ULTSYM.2010.5935791

Giant shear mode electromechanical coupling coefficient k₁₅ in c-axis tilted ScAlN films

Takahiko Yanagitani^*, Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara, Morito Akiyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

62 Citations (Scopus)

Abstract

Giant shear mode electromechanical coupling coeficient k₁₅' of 0.32 (k₁₅²10 %) were found in the c-axis 33° tilted ScAlN films. High k₁₅ values were observed even in the high temperature of 600 C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.

Original language	English
Title of host publication	2010 IEEE International Ultrasonics Symposium, IUS 2010
Pages	2095-2098
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2010.5935791
Publication status	Published - 2010
Externally published	Yes
Event	2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States Duration: 2010 Oct 11 → 2010 Oct 14

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
ISSN (Print)	1051-0117

Other

Other	2010 IEEE International Ultrasonics Symposium, IUS 2010
Country/Territory	United States
City	San Diego, CA
Period	10/10/11 → 10/10/14

Keywords

AlN film
BAW resonator
Electromechanical coupling coefficient
FBAR
ScAlN film
TCF
Thickness shear mode

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2010.5935791

Cite this

Yanagitani, T, Arakawa, K, Kano, K, Teshigahara, A & Akiyama, M 2010, Giant shear mode electromechanical coupling coefficient k₁₅ in c-axis tilted ScAlN films. in 2010 IEEE International Ultrasonics Symposium, IUS 2010., 5935791, Proceedings - IEEE Ultrasonics Symposium, pp. 2095-2098, 2010 IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 10/10/11. https://doi.org/10.1109/ULTSYM.2010.5935791

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abstract = "Giant shear mode electromechanical coupling coeficient k15' of 0.32 (k15210 %) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600 C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.",

keywords = "AlN film, BAW resonator, Electromechanical coupling coefficient, FBAR, ScAlN film, TCF, Thickness shear mode",

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AU - Akiyama, Morito

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