Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Takahiko Yanagitani, Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara, Morito Akiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Citations (Scopus)

Abstract

Giant shear mode electromechanical coupling coeficient k15' of 0.32 (k15210 %) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600 C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.

Original languageEnglish
Title of host publication2010 IEEE International Ultrasonics Symposium, IUS 2010
Pages2095-2098
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Externally publishedYes
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Keywords

  • AlN film
  • BAW resonator
  • Electromechanical coupling coefficient
  • FBAR
  • ScAlN film
  • TCF
  • Thickness shear mode

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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  • Cite this

    Yanagitani, T., Arakawa, K., Kano, K., Teshigahara, A., & Akiyama, M. (2010). Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films. In 2010 IEEE International Ultrasonics Symposium, IUS 2010 (pp. 2095-2098). [5935791] (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2010.5935791