Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Takahiko Yanagitani, Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara, Morito Akiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

50 Citations (Scopus)

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Physics & Astronomy