Abstract
Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.
| Original language | English |
|---|---|
| Pages (from-to) | 1669-1675 |
| Number of pages | 7 |
| Journal | IEICE Electronics Express |
| Volume | 6 |
| Issue number | 23 |
| DOIs | |
| Publication status | Published - 2009 |
| Externally published | Yes |
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Keywords
- Aerosol deposition
- Mach-zehnder interferometer
- Optical modulator
- Plzt
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition. / Shimizu, Takanori; Nakada, Masafumi; Tsuda, Hiroki; Miyazaki, Hiroshi; Akedo, Jun; Ohashi, Keishi.
In: IEICE Electronics Express, Vol. 6, No. 23, 2009, p. 1669-1675.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition
AU - Shimizu, Takanori
AU - Nakada, Masafumi
AU - Tsuda, Hiroki
AU - Miyazaki, Hiroshi
AU - Akedo, Jun
AU - Ohashi, Keishi
PY - 2009
Y1 - 2009
N2 - Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.
AB - Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.
KW - Aerosol deposition
KW - Mach-zehnder interferometer
KW - Optical modulator
KW - Plzt
UR - http://www.scopus.com/inward/record.url?scp=72649097986&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=72649097986&partnerID=8YFLogxK
U2 - 10.1587/elex.6.1669
DO - 10.1587/elex.6.1669
M3 - Article
AN - SCOPUS:72649097986
VL - 6
SP - 1669
EP - 1675
JO - IEICE Electronics Express
JF - IEICE Electronics Express
SN - 1349-2543
IS - 23
ER -