Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition

Takanori Shimizu; Masafumi Nakada; Hiroki Tsuda; Hiroshi Miyazaki; Jun Akedo; Keishi Ohashi

doi:10.1587/elex.6.1669

Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition

Takanori Shimizu, Masafumi Nakada, Hiroki Tsuda, Hiroshi Miyazaki, Jun Akedo, Keishi Ohashi

Research Organization for Nano & Life Innovation

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.

Original language	English
Pages (from-to)	1669-1675
Number of pages	7
Journal	ieice electronics express
Volume	6
Issue number	23
DOIs	https://doi.org/10.1587/elex.6.1669
Publication status	Published - 2009 Dec 30

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Keywords

Aerosol deposition
Mach-zehnder interferometer
Optical modulator
Plzt

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

Shimizu, T., Nakada, M., Tsuda, H., Miyazaki, H., Akedo, J., & Ohashi, K. (2009). Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition. ieice electronics express, 6(23), 1669-1675. https://doi.org/10.1587/elex.6.1669

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abstract = "Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.",

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AU - Akedo, Jun

AU - Ohashi, Keishi

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Access to Document

10.1587/elex.6.1669