Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

K. Nishioka, S. Murayama, Toshio Ohsawa, Y. Egashira, H. Komiyama

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1653-1655
Number of pages3
JournalJournal of Materials Science Letters
Volume17
Issue number19
Publication statusPublished - 1998
Externally publishedYes

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Organic Chemicals
Metallorganic chemical vapor deposition
Film growth
Reaction kinetics
Stoichiometry
X ray diffraction analysis
Ferroelectric materials
Chemical vapor deposition
Numerical methods
Metals
Chemical analysis

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2 . / Nishioka, K.; Murayama, S.; Ohsawa, Toshio; Egashira, Y.; Komiyama, H.

In: Journal of Materials Science Letters, Vol. 17, No. 19, 1998, p. 1653-1655.

Research output: Contribution to journalArticle

@article{7c5aa26dda5d40469defa6fe15949b10,
title = "Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2",
author = "K. Nishioka and S. Murayama and Toshio Ohsawa and Y. Egashira and H. Komiyama",
year = "1998",
language = "English",
volume = "17",
pages = "1653--1655",
journal = "Journal of Materials Science Letters",
issn = "0261-8028",
publisher = "Chapman & Hall",
number = "19",

}

TY - JOUR

T1 - Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

AU - Nishioka, K.

AU - Murayama, S.

AU - Ohsawa, Toshio

AU - Egashira, Y.

AU - Komiyama, H.

PY - 1998

Y1 - 1998

UR - http://www.scopus.com/inward/record.url?scp=0032178251&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032178251&partnerID=8YFLogxK

M3 - Article

VL - 17

SP - 1653

EP - 1655

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

SN - 0261-8028

IS - 19

ER -