Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

Growth mechanism of PbTiO₃ films by metal organic chemical vapor deposition from Pb(DPM)₂, Ti(DPM)₂(i-OPr)₂ and O₂

K. Nishioka^*, S. Murayama, Toshio Ohsawa, Y. Egashira, H. Komiyama

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1653-1655
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	17
Issue number	19
Publication status	Published - 1998
Externally published	Yes

@article{7c5aa26dda5d40469defa6fe15949b10,

title = "Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2 ",

author = "K. Nishioka and S. Murayama and Toshio Ohsawa and Y. Egashira and H. Komiyama",

year = "1998",

language = "English",

volume = "17",

pages = "1653--1655",

journal = "Journal of Materials Science Letters",

issn = "0261-8028",

publisher = "Chapman & Hall",

number = "19",

}

TY - JOUR

T1 - Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

AU - Nishioka, K.

AU - Murayama, S.

AU - Ohsawa, Toshio

AU - Egashira, Y.

AU - Komiyama, H.

PY - 1998

Y1 - 1998

UR - http://www.scopus.com/inward/record.url?scp=0032178251&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032178251&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032178251

SN - 0261-8028

VL - 17

SP - 1653

EP - 1655

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 19

ER -