Abstract
Growth mechanism of a lead titanate (PbTiO3, PTO) thin film at the initial stage has been made clear. The mechanism is strongly affected by accumulation and release of stress. Flatness of the surface and the crystallographic orientation of the PTO film change with growth mode.
Original language | English |
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Pages (from-to) | 323-328 |
Number of pages | 6 |
Journal | Applied Surface Science |
Volume | 216 |
Issue number | 1-4 SPEC. |
DOIs | |
Publication status | Published - 2003 Jun 30 |
Externally published | Yes |
Keywords
- Film orientation
- Growth mechanism
- PTO
- Residual stress
- Surface roughness
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Condensed Matter Physics