TY - GEN
T1 - Growth of crack-free 100mm-diameter 4H-SiC crystals with low micropipe densities
AU - Nakabayashi, M.
AU - Fujimoto, T.
AU - Katsuno, M.
AU - Ohtani, N.
AU - Tsuge, H.
AU - Yashiro, H.
AU - Aigo, T.
AU - Hoshino, T.
AU - Hirano, H.
AU - Tatsumi, K.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - The theromoelastic stress in post-growth SiC crystals has been investigated in order to suppress the cracks which were frequently observed in SiC crystals with larger diameters. Optimizing the temperature distribution in growing crystals lead to reduction of tensile stress components, and thus resulting in crack-free 100mm diameter SiC crystals with micropipe (MP) densities of 0.025/cm2. The concept of process optimization we established is confirmed to be effective to the growth of large diameter SiC crystals with mechanical stability.
AB - The theromoelastic stress in post-growth SiC crystals has been investigated in order to suppress the cracks which were frequently observed in SiC crystals with larger diameters. Optimizing the temperature distribution in growing crystals lead to reduction of tensile stress components, and thus resulting in crack-free 100mm diameter SiC crystals with micropipe (MP) densities of 0.025/cm2. The concept of process optimization we established is confirmed to be effective to the growth of large diameter SiC crystals with mechanical stability.
KW - 100Mm-diameter SiC substrate
KW - Lateral enlargement growth
KW - Thermoelastic stress
UR - http://www.scopus.com/inward/record.url?scp=63849187444&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=63849187444&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:63849187444
SN - 9780878493579
T3 - Materials Science Forum
SP - 3
EP - 6
BT - Silicon Carbide and Related Materials 2007
A2 - Suzuki, Akira
A2 - Okumura, Hajime
A2 - Fukuda, Kenji
A2 - Nishizawa, Shin-ichi
A2 - Kimoto, Tsunenobu
A2 - Fuyuki, Takashi
PB - Trans Tech Publications Ltd
T2 - 12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007
Y2 - 14 October 2007 through 19 October 2007
ER -