Growth of crack-free 100mm-diameter 4H-SiC crystals with low micropipe densities

M. Nakabayashi, T. Fujimoto, M. Katsuno, N. Ohtani, H. Tsuge, H. Yashiro, T. Aigo, T. Hoshino, H. Hirano, K. Tatsumi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

27 Citations (Scopus)

Fingerprint Dive into the research topics of 'Growth of crack-free 100mm-diameter 4H-SiC crystals with low micropipe densities'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy