Growth of grass like architectures on Si substrate and its mechanism study

Lijiao Hu, Yang Ju, Atsushi Hosoi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

Original languageEnglish
Title of host publication13th International Conference on Fracture 2013, ICF 2013
PublisherChinese Society of Theoretical and Applied Mechanics
Pages2988-2992
Number of pages5
Volume4
Publication statusPublished - 2013
Externally publishedYes
Event13th International Conference on Fracture 2013, ICF 2013 - Beijing
Duration: 2013 Jun 162013 Jun 21

Other

Other13th International Conference on Fracture 2013, ICF 2013
CityBeijing
Period13/6/1613/6/21

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Keywords

  • Compressive stress
  • Grass like architectures
  • Nickel catalyst
  • Thermal oxidation

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology

Cite this

Hu, L., Ju, Y., & Hosoi, A. (2013). Growth of grass like architectures on Si substrate and its mechanism study. In 13th International Conference on Fracture 2013, ICF 2013 (Vol. 4, pp. 2988-2992). Chinese Society of Theoretical and Applied Mechanics.