Abstract
Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.
| Original language | English |
|---|---|
| Title of host publication | 13th International Conference on Fracture 2013, ICF 2013 |
| Publisher | Chinese Society of Theoretical and Applied Mechanics |
| Pages | 2988-2992 |
| Number of pages | 5 |
| Volume | 4 |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 13th International Conference on Fracture 2013, ICF 2013 - Beijing Duration: 2013 Jun 16 → 2013 Jun 21 |
Other
| Other | 13th International Conference on Fracture 2013, ICF 2013 |
|---|---|
| City | Beijing |
| Period | 13/6/16 → 13/6/21 |
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Keywords
- Compressive stress
- Grass like architectures
- Nickel catalyst
- Thermal oxidation
ASJC Scopus subject areas
- Geotechnical Engineering and Engineering Geology
Cite this
Hu, L., Ju, Y., & Hosoi, A. (2013). Growth of grass like architectures on Si substrate and its mechanism study. In 13th International Conference on Fracture 2013, ICF 2013 (Vol. 4, pp. 2988-2992). Chinese Society of Theoretical and Applied Mechanics.