Growth of grass like architectures on Si substrate and its mechanism study

Lijiao Hu, Yang Ju, Atsushi Hosoi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

Original languageEnglish
Title of host publication13th International Conference on Fracture 2013, ICF 2013
PublisherChinese Society of Theoretical and Applied Mechanics
Pages2988-2992
Number of pages5
Volume4
Publication statusPublished - 2013
Externally publishedYes
Event13th International Conference on Fracture 2013, ICF 2013 - Beijing
Duration: 2013 Jun 162013 Jun 21

Other

Other13th International Conference on Fracture 2013, ICF 2013
CityBeijing
Period13/6/1613/6/21

Fingerprint

grass
substrate
Oxidation
Catalysts
Substrates
Compressive stress
Atmospheric humidity
Electron microscopes
Nickel
Scanning
Heating
Fabrication
X ray diffraction
X rays
Silicon
Temperature
Scanning electron microscopy
catalyst
oxidation
silicon

Keywords

  • Compressive stress
  • Grass like architectures
  • Nickel catalyst
  • Thermal oxidation

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology

Cite this

Hu, L., Ju, Y., & Hosoi, A. (2013). Growth of grass like architectures on Si substrate and its mechanism study. In 13th International Conference on Fracture 2013, ICF 2013 (Vol. 4, pp. 2988-2992). Chinese Society of Theoretical and Applied Mechanics.

Growth of grass like architectures on Si substrate and its mechanism study. / Hu, Lijiao; Ju, Yang; Hosoi, Atsushi.

13th International Conference on Fracture 2013, ICF 2013. Vol. 4 Chinese Society of Theoretical and Applied Mechanics, 2013. p. 2988-2992.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hu, L, Ju, Y & Hosoi, A 2013, Growth of grass like architectures on Si substrate and its mechanism study. in 13th International Conference on Fracture 2013, ICF 2013. vol. 4, Chinese Society of Theoretical and Applied Mechanics, pp. 2988-2992, 13th International Conference on Fracture 2013, ICF 2013, Beijing, 13/6/16.
Hu L, Ju Y, Hosoi A. Growth of grass like architectures on Si substrate and its mechanism study. In 13th International Conference on Fracture 2013, ICF 2013. Vol. 4. Chinese Society of Theoretical and Applied Mechanics. 2013. p. 2988-2992
Hu, Lijiao ; Ju, Yang ; Hosoi, Atsushi. / Growth of grass like architectures on Si substrate and its mechanism study. 13th International Conference on Fracture 2013, ICF 2013. Vol. 4 Chinese Society of Theoretical and Applied Mechanics, 2013. pp. 2988-2992
@inproceedings{33b99909693143f5b1027d7e25efad30,
title = "Growth of grass like architectures on Si substrate and its mechanism study",
abstract = "Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.",
keywords = "Compressive stress, Grass like architectures, Nickel catalyst, Thermal oxidation",
author = "Lijiao Hu and Yang Ju and Atsushi Hosoi",
year = "2013",
language = "English",
volume = "4",
pages = "2988--2992",
booktitle = "13th International Conference on Fracture 2013, ICF 2013",
publisher = "Chinese Society of Theoretical and Applied Mechanics",

}

TY - GEN

T1 - Growth of grass like architectures on Si substrate and its mechanism study

AU - Hu, Lijiao

AU - Ju, Yang

AU - Hosoi, Atsushi

PY - 2013

Y1 - 2013

N2 - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

AB - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

KW - Compressive stress

KW - Grass like architectures

KW - Nickel catalyst

KW - Thermal oxidation

UR - http://www.scopus.com/inward/record.url?scp=84898794048&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898794048&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84898794048

VL - 4

SP - 2988

EP - 2992

BT - 13th International Conference on Fracture 2013, ICF 2013

PB - Chinese Society of Theoretical and Applied Mechanics

ER -