Abstract
Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.
| Original language | English |
|---|---|
| Title of host publication | 13th International Conference on Fracture 2013, ICF 2013 |
| Publisher | Chinese Society of Theoretical and Applied Mechanics |
| Pages | 2988-2992 |
| Number of pages | 5 |
| Volume | 4 |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 13th International Conference on Fracture 2013, ICF 2013 - Beijing Duration: 2013 Jun 16 → 2013 Jun 21 |
Other
| Other | 13th International Conference on Fracture 2013, ICF 2013 |
|---|---|
| City | Beijing |
| Period | 13/6/16 → 13/6/21 |
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Keywords
- Compressive stress
- Grass like architectures
- Nickel catalyst
- Thermal oxidation
ASJC Scopus subject areas
- Geotechnical Engineering and Engineering Geology
Cite this
Growth of grass like architectures on Si substrate and its mechanism study. / Hu, Lijiao; Ju, Yang; Hosoi, Atsushi.
13th International Conference on Fracture 2013, ICF 2013. Vol. 4 Chinese Society of Theoretical and Applied Mechanics, 2013. p. 2988-2992.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Growth of grass like architectures on Si substrate and its mechanism study
AU - Hu, Lijiao
AU - Ju, Yang
AU - Hosoi, Atsushi
PY - 2013
Y1 - 2013
N2 - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.
AB - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.
KW - Compressive stress
KW - Grass like architectures
KW - Nickel catalyst
KW - Thermal oxidation
UR - http://www.scopus.com/inward/record.url?scp=84898794048&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84898794048&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84898794048
VL - 4
SP - 2988
EP - 2992
BT - 13th International Conference on Fracture 2013, ICF 2013
PB - Chinese Society of Theoretical and Applied Mechanics
ER -