Growth of grass like architectures on Si substrate and its mechanism study

Lijiao Hu; Yang Ju; Hosoi Atsushi

Growth of grass like architectures on Si substrate and its mechanism study

Lijiao Hu, Yang Ju, Hosoi Atsushi

Research output: Contribution to conference › Paper › peer-review

Abstract

Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

Original language	English
Pages	2988-2992
Number of pages	5
Publication status	Published - 2013 Jan 1
Externally published	Yes
Event	13th International Conference on Fracture 2013, ICF 2013 - Beijing, China Duration: 2013 Jun 16 → 2013 Jun 21

Conference

Conference	13th International Conference on Fracture 2013, ICF 2013
Country	China
City	Beijing
Period	13/6/16 → 13/6/21

Keywords

Compressive stress
Grass like architectures
Nickel catalyst
Thermal oxidation

ASJC Scopus subject areas

Geotechnical Engineering and Engineering Geology

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title = "Growth of grass like architectures on Si substrate and its mechanism study",

abstract = "Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.",

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author = "Lijiao Hu and Yang Ju and Hosoi Atsushi",

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language = "English",

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AU - Hu, Lijiao

AU - Ju, Yang

AU - Atsushi, Hosoi

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N2 - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

AB - Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

KW - Compressive stress

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