Growth of O-Polar and Zn-Polar Ferroelectric MgZnO Thin Films Controlled by Sputtering Geometry

Yohkoh Shiman, Shinji Takayanagi, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Polarization-inverted multilayer devices are attractive for improving the power durability of BAW devices. To fabricate this structure, a polarization control technique is required. Two methods for controlling polarization of MgZnO are available: ion beam induced polarization inversion and external electric field induced polarization inversion. In this study, Zn-polar and O-polar MgZnO thin films were grown and we fabricated polarization-inverted multilayer structure by using ion beam induced polarization inversion. As a result, the resonator excites boldsymbol{2}{ mathbf{nd}} overtone mode, and suppresses fundamental mode. Furthermore, we report conversion loss (CL) vs external electric field ( boldsymbol{E}) hysteresis curve obtained by using external electric field induced polarization inversion.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2022-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/TerritoryItaly
CityVenice
Period22/10/1022/10/13

Keywords

  • 2overtone mode
  • MgZnO
  • Polarization-inversion
  • Polarization-inverted multilayer devices

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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