Growth of TiO2-δ thin film by RF magnetron sputtering using oxygen radicals and Ti metal

Yuichi Shimazu, Teppei Okumura, Enju Sakai, Hiroshi Kumigashira, Mario Okawa, Tomohiko Saitoh, Tohru Higuchi

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science

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