Growth of trumpet-like protrusions during the CVD of silicon carbide films

Yuya Kajikawa, Hideki Ono, Suguru Noda, Hiroshi Komiyama

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)52-55
Number of pages4
JournalChemical Vapor Deposition
Volume8
Issue number2
DOIs
Publication statusPublished - 2002 Mar
Externally publishedYes

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Silicon carbide
silicon carbides
Chemical vapor deposition
vapor deposition
silicon carbide

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrochemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Growth of trumpet-like protrusions during the CVD of silicon carbide films. / Kajikawa, Yuya; Ono, Hideki; Noda, Suguru; Komiyama, Hiroshi.

In: Chemical Vapor Deposition, Vol. 8, No. 2, 03.2002, p. 52-55.

Research output: Contribution to journalArticle

Kajikawa, Yuya ; Ono, Hideki ; Noda, Suguru ; Komiyama, Hiroshi. / Growth of trumpet-like protrusions during the CVD of silicon carbide films. In: Chemical Vapor Deposition. 2002 ; Vol. 8, No. 2. pp. 52-55.
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