Growth of trumpet-like protrusions during the CVD of silicon carbide films

Yuya Kajikawa, Hideki Ono, Suguru Noda, Hiroshi Komiyama

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)52-55
Number of pages4
JournalChemical Vapor Deposition
Volume8
Issue number2
DOIs
Publication statusPublished - 2002 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Surfaces and Interfaces
  • Process Chemistry and Technology

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