Heterogeneously integrated InP/Si metal-oxidesemiconductor capacitor mach-zehnder modulator

Tatsurou Hiraki, Takuma Aihara, Koichi Hasebe, Takuro Fujii, Koji Takeda, Tai Tsuchizawa, Takaaki Kakitsuka, Hiroshi Fukuda, Shinji Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

Engineering & Materials Science