Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

Tatsurou Hiraki, Takuma Aihara, Takuro Fujii, Koji Takeda, Tai Tsuchizawa, Takaaki Kakitsuka, Hiroshi Fukuda, Shinji Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.

Original languageEnglish
Title of host publication2018 European Conference on Optical Communication, ECOC 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538648629
DOIs
Publication statusPublished - 2018 Nov 14
Externally publishedYes
Event2018 European Conference on Optical Communication, ECOC 2018 - Rome, Italy
Duration: 2018 Sep 232018 Sep 27

Publication series

NameEuropean Conference on Optical Communication, ECOC
Volume2018-September

Conference

Conference2018 European Conference on Optical Communication, ECOC 2018
CountryItaly
CityRome
Period18/9/2318/9/27

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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