Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform

Tatsurou Hiraki, Takuma Aihara, Takuro Fujii, Koji Takeda, Tai Tsuchizawa, Takaaki Kakitsuka, Hiroshi Fukuda, Shinji Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A Mach-Zehnder modulator with 300-μ m-Iong membrane InGaAsP phase shifters shows V, L of 0.3 Vcm and 40-Gbit/s NRZ modulations in the C band. Low-temperature-deposited hydrogen-free SiN waveguides enable us to construct the Mach-Zehnder interferometer on a Si platform.

Original languageEnglish
Title of host publication2018 European Conference on Optical Communication, ECOC 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538648629
DOIs
Publication statusPublished - 2018 Nov 14
Externally publishedYes
Event2018 European Conference on Optical Communication, ECOC 2018 - Rome, Italy
Duration: 2018 Sep 232018 Sep 27

Publication series

NameEuropean Conference on Optical Communication, ECOC
Volume2018-September

Conference

Conference2018 European Conference on Optical Communication, ECOC 2018
CountryItaly
CityRome
Period18/9/2318/9/27

Fingerprint

Mach-Zehnder interferometers
Phase shifters
Modulators
Mach number
Hydrogen
Waveguides
Modulation
Membranes
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Hiraki, T., Aihara, T., Fujii, T., Takeda, K., Tsuchizawa, T., Kakitsuka, T., ... Matsuo, S. (2018). Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. In 2018 European Conference on Optical Communication, ECOC 2018 [8535448] (European Conference on Optical Communication, ECOC; Vol. 2018-September). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ECOC.2018.8535448

Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. / Hiraki, Tatsurou; Aihara, Takuma; Fujii, Takuro; Takeda, Koji; Tsuchizawa, Tai; Kakitsuka, Takaaki; Fukuda, Hiroshi; Matsuo, Shinji.

2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8535448 (European Conference on Optical Communication, ECOC; Vol. 2018-September).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hiraki, T, Aihara, T, Fujii, T, Takeda, K, Tsuchizawa, T, Kakitsuka, T, Fukuda, H & Matsuo, S 2018, Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. in 2018 European Conference on Optical Communication, ECOC 2018., 8535448, European Conference on Optical Communication, ECOC, vol. 2018-September, Institute of Electrical and Electronics Engineers Inc., 2018 European Conference on Optical Communication, ECOC 2018, Rome, Italy, 18/9/23. https://doi.org/10.1109/ECOC.2018.8535448
Hiraki T, Aihara T, Fujii T, Takeda K, Tsuchizawa T, Kakitsuka T et al. Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. In 2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8535448. (European Conference on Optical Communication, ECOC). https://doi.org/10.1109/ECOC.2018.8535448
Hiraki, Tatsurou ; Aihara, Takuma ; Fujii, Takuro ; Takeda, Koji ; Tsuchizawa, Tai ; Kakitsuka, Takaaki ; Fukuda, Hiroshi ; Matsuo, Shinji. / Heterogeneously Integrated Mach-Zehnder Modulator Using Membrane InGaAsP Phase Shifter and Hydrogen-Free SiN Waveguide on Si Platform. 2018 European Conference on Optical Communication, ECOC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (European Conference on Optical Communication, ECOC).
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