Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages116-119
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
Duration: 2008 Jan 132008 Jan 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CityTucson, AZ
Period08/1/1308/1/17

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Iwase, E., Onoe, H., Matsumoto, K., & Shimoyama, I. (2008). Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 116-119). [4443606] https://doi.org/10.1109/MEMSYS.2008.4443606