Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-μm-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages116-119
Number of pages4
DOIs
Publication statusPublished - 2008 Sep 1
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Iwase, E., Onoe, H., Matsumoto, K., & Shimoyama, I. (2008). Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 116-119). [4443606] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443606