High-κ dielectric nanofilms fabricated from titania nanosheets

Minoru Osada, Yasuo Ebina, Hiroshi Funakubo, Shintaro Yokoyama, Takanori Kiguchi, Kazunori Takada, Takayoshi Sasaki

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The performance of high-κdielectric nanofilms fabricated from titania nanosheets by a solution-based layer-by-layer approach, was investigated. Multilayer films of large-sized titania nanosheets were fabricated by an electrostatic self-assembly technique using poly(diallyldimethylammonium) (PDDA) as a counter polycation. The films show a low leakage current density with a high dielectric constant of ~125 even for thickness down to 10 nm. The results clearly show that the highκ-titania nanosheets are model experimental system for prospective nanoelectronics technology and fundamental physics. The soft-chemistry-based fabrication has great potential for the rational design and construction of nanoscale devices.

Original languageEnglish
Pages (from-to)1023-1027
Number of pages5
JournalAdvanced Materials
Issue number8
Publication statusPublished - 2006 Apr 18
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)

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    Osada, M., Ebina, Y., Funakubo, H., Yokoyama, S., Kiguchi, T., Takada, K., & Sasaki, T. (2006). High-κ dielectric nanofilms fabricated from titania nanosheets. Advanced Materials, 18(8), 1023-1027. https://doi.org/10.1002/adma.200501224