High-aspect ratio microfabrication of crosslinked polytetra-fluoroethylene using synchrotron radiation direct photo-etching

Takanori Katoh*, Yasunori Sato, Daichi Yamaguchi, Shigetoshi Ikeda, Yasushi Aoki, Akihiro Oshima, Masakazu Washio, Yoneho Tabata

*Corresponding author for this work

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