High aspect ratio nanovolume glass cell array fabricated by area-selective silicon electrochemical etching process

Takayuki Homma*, Hirotaka Sato, Kentaro Mori, Tetsuya Osaka, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds