High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi, Kosuke Yamaya, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The propagation properties and resonance characteristics of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiTaO3 (LT) thin plate bonded to an AT-cut quartz substrate were investigated experimentally. For the LSAWs and LLSAWs, the bonded structures of 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) and X-cut 31°Y-propagating LT (X31°Y-LT)/AT-cut 45°X-propagating quartz (AT45°X-quartz) were fabricated, respectively. For the LSAW on 36°YX-LT/AT90°X-quartz, the electromechanical coupling factor (K2) of 11.1% was obtained at an LT thin-plate thickness of 0.25 wavelength, whereas K2 for a single LT substrate was measured to be 5.7%. For the LLSAW on X31°Y-LT/AT45°X-quartz, K2 increased from 2.8% for the single LT substrate to 7.2% at an LT thin-plate thickness of 0.14 wavelength. Furthermore, K2 of approximately 12% and the temperature coefficient of frequency (TCF) of 0 ppm/°C were theoretically obtained simultaneously for the LSAW on 36°YX-LT/AT-cut 90°X-quartz at a certain thin-plate thickness.

Original languageEnglish
Article number07LD21
JournalJapanese Journal of Applied Physics
Volume57
Issue number7
DOIs
Publication statusPublished - 2018 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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