High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi; Masashi Gomi; Masashi Suzuki; Shoji Kakio; Haruka Suzaki; Toshifumi Yonai; Kazuhito Kishida; Jun Mizuno

doi:10.1109/ULTSYM.2017.8091675

High-coupling leaky SAWs on LiTaO₃ thin plate bonded to quartz substrate

Junki Hayashi, Masashi Gomi, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

Research Organization for Nano & Life Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K² and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K² is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K², the propagation properties of LSAWs and LLSAWs on a LiTaO₃ (LT) thin plate bonded to a quartz substrate were investigated experimentally.

Original language	English
Title of host publication	2017 IEEE International Ultrasonics Symposium, IUS 2017
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538633830
DOIs	https://doi.org/10.1109/ULTSYM.2017.8091675
Publication status	Published - 2017 Oct 31
Event	2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9

Other

Other	2017 IEEE International Ultrasonics Symposium, IUS 2017
Country/Territory	United States
City	Washington
Period	17/9/6 → 17/9/9

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2017.8091675

Cite this

Hayashi, J, Gomi, M, Suzuki, M, Kakio, S, Suzaki, H, Yonai, T, Kishida, K & Mizuno, J 2017, High-coupling leaky SAWs on LiTaO₃ thin plate bonded to quartz substrate. in 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8091675, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8091675

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title = "High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate",

abstract = "Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.",

author = "Junki Hayashi and Masashi Gomi and Masashi Suzuki and Shoji Kakio and Haruka Suzaki and Toshifumi Yonai and Kazuhito Kishida and Jun Mizuno",

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AU - Hayashi, Junki

AU - Gomi, Masashi

AU - Suzuki, Masashi

AU - Kakio, Shoji

AU - Suzaki, Haruka

AU - Yonai, Toshifumi

AU - Kishida, Kazuhito

AU - Mizuno, Jun

PY - 2017/10/31

Y1 - 2017/10/31

N2 - Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.

AB - Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.

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Y2 - 6 September 2017 through 9 September 2017

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