High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi, Masashi Gomi, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17/9/617/9/9

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ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Hayashi, J., Gomi, M., Suzuki, M., Kakio, S., Suzaki, H., Yonai, T., Kishida, K., & Mizuno, J. (2017). High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091675] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091675