High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi, Masashi Gomi, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

The propagation properties and resonance characteristics of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiTaO3 (LT) thin plate bonded to an AT-cut quartz substrate were investigated. For the LSAWs and LLSAWs, the bonded structures of 36°Y-cut X-propagating LT (36°YX-LT)/AT-cut X-propagating quartz (ATX-quartz) and X-cut 31°Y-propagating LT (X31°Y-LT)/AT-cut 45°X-propagating quartz (AT45°X-quartz) were fabricated, respectively, and the electromechanical coupling factor (K2) was determined from the measured admittance properties of an interdigital transducer. For the LSAW on 36°YX-LT/ATX-quartz, K2 of 11.8% was obtained experimentally at an LT thin-plate thickness of 0.25 wavelength, whereas K2 for a single LT substrate was measured to be 5.9%. For the LLSAW on X31°Y-LT/AT45°X-quartz, K2 increased from 2.5% for the single LT substrate to 6.2% at an LT thin-plate thickness of 0.28 wavelength. In both the LSAWs and LLSAWs on the bonded substrate, the improvements of resonance characteristics and the temperature coefficient of frequency (TCF) were observed as compared with those of the single LT substrate. Furthermore, K2 of approximately 12% and TCF of 0 ppm/°C were theoretically obtained simultaneously for the LSAW on 36°YX-LT/AT-cut 90°X-propagating quartz at a certain thin-plate thickness.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17/9/617/9/9

Keywords

  • Bonded structure
  • Leaky SAW
  • Longitudinal-type leaky SAW
  • Quartz

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Fingerprint Dive into the research topics of 'High-coupling leaky SAWs on LiTaO<sub>3</sub> thin plate bonded to quartz substrate'. Together they form a unique fingerprint.

  • Cite this

    Hayashi, J., Gomi, M., Suzuki, M., Kakio, S., Suzaki, H., Yonai, T., Kishida, K., & Mizuno, J. (2017). High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091566] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091566