High depth resolution SIMS analysis using metal cluster complex ion bombardment

M. Tomita*, T. Kinno, M. Koike, H. Tanaka, S. Takeno, Y. Fujiwara, K. Kondou, Y. Teranishi, H. Nonaka, T. Fujimoto, A. Kurokawa, S. Ichimura

*Corresponding author for this work

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Physics & Astronomy