High-Efficiency Air-Clad Type Silicon-Nitride Ring-Resonator for Bio-Sensing Applications

Nithi Atthi*, Manuel Mendez-Astudillo, Suruk Udomsom, Atsushi Matsumoto, Wittawat Yamwong, Nipapan Klunngien, Ukrit Mankong, Somchai Pinlaor, Kazuo Imai, Tuptim Angkaew, Atsushi Kanno, Naokatsu Yamamoto, Tetsuya Kawanishi, Toshimasa Umezawa

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a high-efficiency silicon nitride (SiN) based air-clad type ring resonator that sandwiched with air cladding and SiO2 cladding for silicon photonic (SiPh) device was demonstrated. The simulation results showed that 400 nm-thick SiN waveguide have maximum coupling efficiency with a coupling loss of 7.2 dB. By using CMOS compatible process with single lithography (stepper) and reactive ion etching step, high qualities SiN waveguide was fabricated without silicon wafer warpage. The optical output characteristics of ring resonators with the free spectral range of 3.9 nm were obtained. This device can detect NaCl concentrations of 50-1000 mMole in deionized water. Therefore, SiN waveguide grating coupler is one of a promising SiPh devices for bio-sensing applications.

Original languageEnglish
Title of host publicationProceedings of the 2022 International Electrical Engineering Congress, iEECON 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665402064
DOIs
Publication statusPublished - 2022
Event2022 International Electrical Engineering Congress, iEECON 2022 - Khon Kaen, Thailand
Duration: 2022 Mar 92022 Mar 11

Publication series

NameProceedings of the 2022 International Electrical Engineering Congress, iEECON 2022

Conference

Conference2022 International Electrical Engineering Congress, iEECON 2022
Country/TerritoryThailand
CityKhon Kaen
Period22/3/922/3/11

Keywords

  • air clad
  • biosensor
  • optical ring resonator
  • silicon nitride
  • silicon photonics

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering
  • Instrumentation

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