High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima; Takahiro Shimidzu; Takahiko Yanagitani

doi:10.1109/ULTSYM.2018.8579933

High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima, Takahiro Shimidzu, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

Original language	English
Title of host publication	2018 IEEE International Ultrasonics Symposium, IUS 2018
Publisher	IEEE Computer Society
Volume	2018-October
ISBN (Electronic)	9781538634257
DOIs	https://doi.org/10.1109/ULTSYM.2018.8579933
Publication status	Published - 2018 Dec 17
Event	2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 2018 Oct 22 → 2018 Oct 25

Other

Other	2018 IEEE International Ultrasonics Symposium, IUS 2018
Country	Japan
City	Kobe
Period	18/10/22 → 18/10/25

Keywords

polarity inverted structure
ultrasonic transducer
ZnO

ASJC Scopus subject areas

Acoustics and Ultrasonics

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10.1109/ULTSYM.2018.8579933

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Majima, T., Shimidzu, T., & Yanagitani, T. (2018). High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8579933] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579933

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abstract = "The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.",

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N2 - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

AB - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

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