TY - GEN
T1 - High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film
AU - Majima, Tsuyoshi
AU - Shimidzu, Takahiro
AU - Yanagitani, Takahiko
N1 - Funding Information:
This work was supported by the Japan Science and Technology Agency, PRESTO (JST-PRESTO), No. JPMJPR16R8) and KAKENHI (Grant-in-Aid for Scientific Research(B) No. 16H04356)
Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/17
Y1 - 2018/12/17
N2 - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.
AB - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.
KW - ZnO
KW - polarity inverted structure
KW - ultrasonic transducer
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U2 - 10.1109/ULTSYM.2018.8579933
DO - 10.1109/ULTSYM.2018.8579933
M3 - Conference contribution
AN - SCOPUS:85060568875
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018
PB - IEEE Computer Society
T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018
Y2 - 22 October 2018 through 25 October 2018
ER -