High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima; Takahiro Shimidzu; Takahiko Yanagitani

doi:10.1109/ULTSYM.2018.8579933

High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima, Takahiro Shimidzu, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

Original language	English
Title of host publication	2018 IEEE International Ultrasonics Symposium, IUS 2018
Publisher	IEEE Computer Society
Volume	2018-October
ISBN (Electronic)	9781538634257
DOIs	https://doi.org/10.1109/ULTSYM.2018.8579933
Publication status	Published - 2018 Dec 17
Event	2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 2018 Oct 22 → 2018 Oct 25

Other

Other	2018 IEEE International Ultrasonics Symposium, IUS 2018
Country	Japan
City	Kobe
Period	18/10/22 → 18/10/25

Keywords

polarity inverted structure
ultrasonic transducer
ZnO

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2018.8579933

Fingerprint Dive into the research topics of 'High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film'. Together they form a unique fingerprint.

Cite this

Majima, T., Shimidzu, T., & Yanagitani, T. (2018). High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8579933] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579933

@inproceedings{e19911f4a1004d9eac2e4d2b14d64143,

title = "High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film",

abstract = "The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.",

keywords = "polarity inverted structure, ultrasonic transducer, ZnO",

author = "Tsuyoshi Majima and Takahiro Shimidzu and Takahiko Yanagitani",

year = "2018",

month = dec,

day = "17",

doi = "10.1109/ULTSYM.2018.8579933",

language = "English",

volume = "2018-October",

booktitle = "2018 IEEE International Ultrasonics Symposium, IUS 2018",

publisher = "IEEE Computer Society",

note = "2018 IEEE International Ultrasonics Symposium, IUS 2018 ; Conference date: 22-10-2018 Through 25-10-2018",

}

TY - GEN

T1 - High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

AU - Majima, Tsuyoshi

AU - Shimidzu, Takahiro

AU - Yanagitani, Takahiko

PY - 2018/12/17

Y1 - 2018/12/17

N2 - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

AB - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

KW - polarity inverted structure

KW - ultrasonic transducer

KW - ZnO

UR - http://www.scopus.com/inward/record.url?scp=85060568875&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85060568875&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2018.8579933

DO - 10.1109/ULTSYM.2018.8579933

M3 - Conference contribution

AN - SCOPUS:85060568875

VL - 2018-October

BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018

PB - IEEE Computer Society

T2 - 2018 IEEE International Ultrasonics Symposium, IUS 2018

Y2 - 22 October 2018 through 25 October 2018

ER -