Abstract
The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.
| Original language | English |
|---|---|
| Title of host publication | 2018 IEEE International Ultrasonics Symposium, IUS 2018 |
| Publisher | IEEE Computer Society |
| Volume | 2018-October |
| ISBN (Electronic) | 9781538634257 |
| DOIs | |
| Publication status | Published - 2018 Dec 17 |
| Event | 2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 2018 Oct 22 → 2018 Oct 25 |
Other
| Other | 2018 IEEE International Ultrasonics Symposium, IUS 2018 |
|---|---|
| Country | Japan |
| City | Kobe |
| Period | 18/10/22 → 18/10/25 |
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Keywords
- polarity inverted structure
- ultrasonic transducer
- ZnO
ASJC Scopus subject areas
- Acoustics and Ultrasonics
Cite this
High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. / Majima, Tsuyoshi; Shimidzu, Takahiro; Yanagitani, Takahiko.
2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October IEEE Computer Society, 2018. 8579933.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film
AU - Majima, Tsuyoshi
AU - Shimidzu, Takahiro
AU - Yanagitani, Takahiko
PY - 2018/12/17
Y1 - 2018/12/17
N2 - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.
AB - The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.
KW - polarity inverted structure
KW - ultrasonic transducer
KW - ZnO
UR - http://www.scopus.com/inward/record.url?scp=85060568875&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85060568875&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2018.8579933
DO - 10.1109/ULTSYM.2018.8579933
M3 - Conference contribution
AN - SCOPUS:85060568875
VL - 2018-October
BT - 2018 IEEE International Ultrasonics Symposium, IUS 2018
PB - IEEE Computer Society
ER -