High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima, Takahiro Shimidzu, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
Country/TerritoryJapan
CityKobe
Period18/10/2218/10/25

Keywords

  • ZnO
  • polarity inverted structure
  • ultrasonic transducer

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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