High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film

Tsuyoshi Majima, Takahiro Shimidzu, Takahiko Yanagitani

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The ultrasonic transducer is an important component to determine the performance of ultrasonic microscope. The ultrasonic emission area become smaller in the high frequency range when impedance matching between the transducer and 50 Ω measurement system is considered. Small emission area causes decrease in signal-to-noise ratio (S/N) due to the low sound pressure in the focus point. Polarity inverted n- layered transducer operates with high frequency in n-th mode. Therefore, the emission area and film thickness increase by n- times. Large emission area improves S/N. In this study, we report the fabrication of ZnO thin film polarity inverted structure on the Si02 glass buffer rod by RF magnetron sputtering. The piezoelectricity and performance of transducer in water medium were investigated.

    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
    PublisherIEEE Computer Society
    Volume2018-October
    ISBN (Electronic)9781538634257
    DOIs
    Publication statusPublished - 2018 Dec 17
    Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 2018 Oct 222018 Oct 25

    Other

    Other2018 IEEE International Ultrasonics Symposium, IUS 2018
    CountryJapan
    CityKobe
    Period18/10/2218/10/25

    Fingerprint

    polarity
    transducers
    ultrasonics
    piezoelectricity
    impedance matching
    sound pressure
    magnetron sputtering
    signal to noise ratios
    film thickness
    rods
    low pressure
    buffers
    frequency ranges
    microscopes
    fabrication
    glass
    causes
    thin films
    water

    Keywords

    • polarity inverted structure
    • ultrasonic transducer
    • ZnO

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    Cite this

    Majima, T., Shimidzu, T., & Yanagitani, T. (2018). High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. In 2018 IEEE International Ultrasonics Symposium, IUS 2018 (Vol. 2018-October). [8579933] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579933

    High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. / Majima, Tsuyoshi; Shimidzu, Takahiro; Yanagitani, Takahiko.

    2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October IEEE Computer Society, 2018. 8579933.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Majima, T, Shimidzu, T & Yanagitani, T 2018, High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. in 2018 IEEE International Ultrasonics Symposium, IUS 2018. vol. 2018-October, 8579933, IEEE Computer Society, 2018 IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 18/10/22. https://doi.org/10.1109/ULTSYM.2018.8579933
    Majima T, Shimidzu T, Yanagitani T. High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. In 2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October. IEEE Computer Society. 2018. 8579933 https://doi.org/10.1109/ULTSYM.2018.8579933
    Majima, Tsuyoshi ; Shimidzu, Takahiro ; Yanagitani, Takahiko. / High Efficiency Ultrasonic Transducer Using Polarity Inverted ZnO Film. 2018 IEEE International Ultrasonics Symposium, IUS 2018. Vol. 2018-October IEEE Computer Society, 2018.
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