High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

Takahiko Yanagitani, Katsuyoshi Katada, Masashi Suzuki, Kiyotaka Wasa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3film was demonstrated. Thickness extensional mode electromechanical coupling coefficient ktof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high ktof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high ktof 0.42 was also observed in thick PbTiO3film (with 2.8 μm) at 550 °C.

Original languageEnglish
Title of host publicationIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781479949168
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, Province of China
Duration: 2014 May 192014 May 22

Publication series

NameIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

Other

Other2014 IEEE International Frequency Control Symposium, IFCS 2014
CountryTaiwan, Province of China
CityTaipei
Period14/5/1914/5/22

Keywords

  • (key words)
  • Electromechanical coupling coefficient
  • High temperature piezoelectric material
  • Shift of Curie temperature
  • Thick epitaxial PZT film

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    Yanagitani, T., Katada, K., Suzuki, M., & Wasa, K. (2014). High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C. In IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings [6859872] (IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings). IEEE Computer Society. https://doi.org/10.1109/FCS.2014.6859872