High quality single-walled carbon nanotube synthesis using remote plasma CVD

Toshiyuki Ohashi, Ryogo Kato, Takumi Ochiai, Toshio Tokune, Hiroshi Kawarada

    Research output: Contribution to journalArticle

    15 Citations (Scopus)

    Abstract

    Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

    Original languageEnglish
    Pages (from-to)184-187
    Number of pages4
    JournalDiamond and Related Materials
    Volume24
    DOIs
    Publication statusPublished - 2012 Apr

    Fingerprint

    Plasma CVD
    Single-walled carbon nanotubes (SWCN)
    carbon nanotubes
    vapor deposition
    antennas
    synthesis
    Antennas
    Chemical vapor deposition
    methodology
    Plasmas
    Carbon Monoxide
    Carbon monoxide
    carbon monoxide
    Feedstocks
    Nanotubes
    suggestion
    nanotubes
    Carbon
    Gases
    methylidyne

    Keywords

    • Carbon monoxide
    • Chemical vapor deposition (CVD)
    • Cobalt catalyst
    • Ion bombardment
    • Remote plasma CVD
    • Single-walled carbon nanotubes

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Materials Chemistry
    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Physics and Astronomy(all)
    • Chemistry(all)

    Cite this

    High quality single-walled carbon nanotube synthesis using remote plasma CVD. / Ohashi, Toshiyuki; Kato, Ryogo; Ochiai, Takumi; Tokune, Toshio; Kawarada, Hiroshi.

    In: Diamond and Related Materials, Vol. 24, 04.2012, p. 184-187.

    Research output: Contribution to journalArticle

    Ohashi, Toshiyuki ; Kato, Ryogo ; Ochiai, Takumi ; Tokune, Toshio ; Kawarada, Hiroshi. / High quality single-walled carbon nanotube synthesis using remote plasma CVD. In: Diamond and Related Materials. 2012 ; Vol. 24. pp. 184-187.
    @article{90d61aad42394529aa853595c8108979,
    title = "High quality single-walled carbon nanotube synthesis using remote plasma CVD",
    abstract = "Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.",
    keywords = "Carbon monoxide, Chemical vapor deposition (CVD), Cobalt catalyst, Ion bombardment, Remote plasma CVD, Single-walled carbon nanotubes",
    author = "Toshiyuki Ohashi and Ryogo Kato and Takumi Ochiai and Toshio Tokune and Hiroshi Kawarada",
    year = "2012",
    month = "4",
    doi = "10.1016/j.diamond.2012.01.014",
    language = "English",
    volume = "24",
    pages = "184--187",
    journal = "Diamond and Related Materials",
    issn = "0925-9635",
    publisher = "Elsevier BV",

    }

    TY - JOUR

    T1 - High quality single-walled carbon nanotube synthesis using remote plasma CVD

    AU - Ohashi, Toshiyuki

    AU - Kato, Ryogo

    AU - Ochiai, Takumi

    AU - Tokune, Toshio

    AU - Kawarada, Hiroshi

    PY - 2012/4

    Y1 - 2012/4

    N2 - Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

    AB - Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

    KW - Carbon monoxide

    KW - Chemical vapor deposition (CVD)

    KW - Cobalt catalyst

    KW - Ion bombardment

    KW - Remote plasma CVD

    KW - Single-walled carbon nanotubes

    UR - http://www.scopus.com/inward/record.url?scp=84858333568&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84858333568&partnerID=8YFLogxK

    U2 - 10.1016/j.diamond.2012.01.014

    DO - 10.1016/j.diamond.2012.01.014

    M3 - Article

    AN - SCOPUS:84858333568

    VL - 24

    SP - 184

    EP - 187

    JO - Diamond and Related Materials

    JF - Diamond and Related Materials

    SN - 0925-9635

    ER -