High quality single-walled carbon nanotube synthesis using remote plasma CVD

Toshiyuki Ohashi, Ryogo Kato, Takumi Ochiai, Toshio Tokune, Hiroshi Kawarada

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

Original languageEnglish
Pages (from-to)184-187
Number of pages4
JournalDiamond and Related Materials
Volume24
DOIs
Publication statusPublished - 2012 Apr 1

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Keywords

  • Carbon monoxide
  • Chemical vapor deposition (CVD)
  • Cobalt catalyst
  • Ion bombardment
  • Remote plasma CVD
  • Single-walled carbon nanotubes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

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