Abstract
Many kinds of tilt sensors have been developed and applied to the field of tilt angle measurement. However, the improvement of a"Size", "Cost","Operability" and other"Performances" is expected. On the other hand, the high performance acceleration sensors were developed by MEMS technology, but there is almost no high sensitive MEMS sensor that detects a minute gravity change. We examined the possibility of development of tilt sensor fabricated by quartz crystal anisotropic-etching technology which is suitable for mass production. The developed tilt sensor is constructed of"Beam spring","Moving element" and"Capacitive detector of comb electrode". The feature of this sensor is that sensor chip is placed horizontally, and this arrangement enables fabrication of"Two axes sensor" on one wafer chip. We developed quartz tilt sensor using our laboratory fabrication process. Size of sensor chip is 5×5×0.1 mm3, and the evaluation result showed the highest level performance of 0.0001 degree resolution.
| Original language | English |
|---|---|
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 127 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2007 |
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Keywords
- Anisotropic etching
- Capacitance
- Micromachining
- Quartz
- Tilt sensor
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
High sensitive tilt sensor for quartz micromachining. / Kohsaka, Fusao; Liang, Jinxing; Matsuo, Takahiro; Ueda, Toshitsugu.
In: IEEJ Transactions on Sensors and Micromachines, Vol. 127, No. 10, 2007.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - High sensitive tilt sensor for quartz micromachining
AU - Kohsaka, Fusao
AU - Liang, Jinxing
AU - Matsuo, Takahiro
AU - Ueda, Toshitsugu
PY - 2007
Y1 - 2007
N2 - Many kinds of tilt sensors have been developed and applied to the field of tilt angle measurement. However, the improvement of a"Size", "Cost","Operability" and other"Performances" is expected. On the other hand, the high performance acceleration sensors were developed by MEMS technology, but there is almost no high sensitive MEMS sensor that detects a minute gravity change. We examined the possibility of development of tilt sensor fabricated by quartz crystal anisotropic-etching technology which is suitable for mass production. The developed tilt sensor is constructed of"Beam spring","Moving element" and"Capacitive detector of comb electrode". The feature of this sensor is that sensor chip is placed horizontally, and this arrangement enables fabrication of"Two axes sensor" on one wafer chip. We developed quartz tilt sensor using our laboratory fabrication process. Size of sensor chip is 5×5×0.1 mm3, and the evaluation result showed the highest level performance of 0.0001 degree resolution.
AB - Many kinds of tilt sensors have been developed and applied to the field of tilt angle measurement. However, the improvement of a"Size", "Cost","Operability" and other"Performances" is expected. On the other hand, the high performance acceleration sensors were developed by MEMS technology, but there is almost no high sensitive MEMS sensor that detects a minute gravity change. We examined the possibility of development of tilt sensor fabricated by quartz crystal anisotropic-etching technology which is suitable for mass production. The developed tilt sensor is constructed of"Beam spring","Moving element" and"Capacitive detector of comb electrode". The feature of this sensor is that sensor chip is placed horizontally, and this arrangement enables fabrication of"Two axes sensor" on one wafer chip. We developed quartz tilt sensor using our laboratory fabrication process. Size of sensor chip is 5×5×0.1 mm3, and the evaluation result showed the highest level performance of 0.0001 degree resolution.
KW - Anisotropic etching
KW - Capacitance
KW - Micromachining
KW - Quartz
KW - Tilt sensor
UR - http://www.scopus.com/inward/record.url?scp=44149115688&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=44149115688&partnerID=8YFLogxK
U2 - 10.1541/ieejsmas.127.431
DO - 10.1541/ieejsmas.127.431
M3 - Article
VL - 127
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 10
ER -