High sensitive tilt sensor for quartz micromachining

Fusao Kohsaka, Jinxing Liang, Takahiro Matsuo, Toshitsugu Ueda

    Research output: Contribution to journal › Article › peer-review

    9 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'High sensitive tilt sensor for quartz micromachining'. Together they form a unique fingerprint.

    Engineering & Materials Science