High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

Hiroyuki Kudo, Takahiro Arakawa, Shinichiro Ohtsuka, Toshiyuki Izumi, Shuichi Shoji, Hirotaka Sato, Hideomi Kobayashi, Kentaro Mori, Takayuki Homma, Tetsuya Osaka, Naoko Iyomoto, Ryuichi Fujimoto, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Tai Oshima, Kazuo Futamoto, Yoh Takei, Taro Ichitsubo, Tamayuki Fujimori, Yoshitaka IshisakiUmeyo Morita, Takeo Koga, Keisuke Shinozaki, Kousuke Sato, Takaya Ohashi, Yoshikatsu Kuroda, Mitsunobu Onishi, Kunio Otake, Fumiaki Beppu

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

Original languageEnglish
Pages (from-to)1190-1195
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number3
Publication statusPublished - 2004 Mar

Fingerprint

calorimeters
Imaging techniques
X rays
sensors
Sensors
Spectrometers
x rays
Thermal diffusion
spectrometers
Sensor arrays
Temperature sensors
Electrodeposition
Cryogenics
energy
temperature sensors
thermal diffusion
electrodeposition
cryogenics
Wavelength
wavelengths

Keywords

  • Array
  • Calorimeter
  • Electrodeposition
  • TES
  • X-ray spectrometer

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications. / Kudo, Hiroyuki; Arakawa, Takahiro; Ohtsuka, Shinichiro; Izumi, Toshiyuki; Shoji, Shuichi; Sato, Hirotaka; Kobayashi, Hideomi; Mori, Kentaro; Homma, Takayuki; Osaka, Tetsuya; Iyomoto, Naoko; Fujimoto, Ryuichi; Mitsuda, Kazuhisa; Yamasaki, Noriko Y.; Oshima, Tai; Futamoto, Kazuo; Takei, Yoh; Ichitsubo, Taro; Fujimori, Tamayuki; Ishisaki, Yoshitaka; Morita, Umeyo; Koga, Takeo; Shinozaki, Keisuke; Sato, Kousuke; Ohashi, Takaya; Kuroda, Yoshikatsu; Onishi, Mitsunobu; Otake, Kunio; Beppu, Fumiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 3, 03.2004, p. 1190-1195.

Research output: Contribution to journalArticle

Kudo, H, Arakawa, T, Ohtsuka, S, Izumi, T, Shoji, S, Sato, H, Kobayashi, H, Mori, K, Homma, T, Osaka, T, Iyomoto, N, Fujimoto, R, Mitsuda, K, Yamasaki, NY, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Ishisaki, Y, Morita, U, Koga, T, Shinozaki, K, Sato, K, Ohashi, T, Kuroda, Y, Onishi, M, Otake, K & Beppu, F 2004, 'High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 43, no. 3, pp. 1190-1195.
Kudo, Hiroyuki ; Arakawa, Takahiro ; Ohtsuka, Shinichiro ; Izumi, Toshiyuki ; Shoji, Shuichi ; Sato, Hirotaka ; Kobayashi, Hideomi ; Mori, Kentaro ; Homma, Takayuki ; Osaka, Tetsuya ; Iyomoto, Naoko ; Fujimoto, Ryuichi ; Mitsuda, Kazuhisa ; Yamasaki, Noriko Y. ; Oshima, Tai ; Futamoto, Kazuo ; Takei, Yoh ; Ichitsubo, Taro ; Fujimori, Tamayuki ; Ishisaki, Yoshitaka ; Morita, Umeyo ; Koga, Takeo ; Shinozaki, Keisuke ; Sato, Kousuke ; Ohashi, Takaya ; Kuroda, Yoshikatsu ; Onishi, Mitsunobu ; Otake, Kunio ; Beppu, Fumiaki. / High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 3. pp. 1190-1195.
@article{55c255a8d86a44479e808a31320f8771,
title = "High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications",
abstract = "An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83{\%}. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.",
keywords = "Array, Calorimeter, Electrodeposition, TES, X-ray spectrometer",
author = "Hiroyuki Kudo and Takahiro Arakawa and Shinichiro Ohtsuka and Toshiyuki Izumi and Shuichi Shoji and Hirotaka Sato and Hideomi Kobayashi and Kentaro Mori and Takayuki Homma and Tetsuya Osaka and Naoko Iyomoto and Ryuichi Fujimoto and Kazuhisa Mitsuda and Yamasaki, {Noriko Y.} and Tai Oshima and Kazuo Futamoto and Yoh Takei and Taro Ichitsubo and Tamayuki Fujimori and Yoshitaka Ishisaki and Umeyo Morita and Takeo Koga and Keisuke Shinozaki and Kousuke Sato and Takaya Ohashi and Yoshikatsu Kuroda and Mitsunobu Onishi and Kunio Otake and Fumiaki Beppu",
year = "2004",
month = "3",
language = "English",
volume = "43",
pages = "1190--1195",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "3",

}

TY - JOUR

T1 - High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

AU - Kudo, Hiroyuki

AU - Arakawa, Takahiro

AU - Ohtsuka, Shinichiro

AU - Izumi, Toshiyuki

AU - Shoji, Shuichi

AU - Sato, Hirotaka

AU - Kobayashi, Hideomi

AU - Mori, Kentaro

AU - Homma, Takayuki

AU - Osaka, Tetsuya

AU - Iyomoto, Naoko

AU - Fujimoto, Ryuichi

AU - Mitsuda, Kazuhisa

AU - Yamasaki, Noriko Y.

AU - Oshima, Tai

AU - Futamoto, Kazuo

AU - Takei, Yoh

AU - Ichitsubo, Taro

AU - Fujimori, Tamayuki

AU - Ishisaki, Yoshitaka

AU - Morita, Umeyo

AU - Koga, Takeo

AU - Shinozaki, Keisuke

AU - Sato, Kousuke

AU - Ohashi, Takaya

AU - Kuroda, Yoshikatsu

AU - Onishi, Mitsunobu

AU - Otake, Kunio

AU - Beppu, Fumiaki

PY - 2004/3

Y1 - 2004/3

N2 - An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

AB - An X-ray microcalorimeter is a cryogenic energy-dispersive spectrometer, which has an energy resolution almost comparable to that of conventional wavelength-dispersive spectrometers. Using a transition edge sensor (TES) as a temperature sensor, the energy resolution can be further improved. We have developed a new method of achieving an array of TES microcalorimeters for the purpose of X-ray imaging. To achieve this, mushroom-shaped X-ray microabsorbers formed using electrodeposition were applied. The temperature of the TES, which is easily degraded by thermal diffusion, was kept sufficiently low throughout the process to achieve practical use. On the bases of this new method, a 2 × 2 (× 4) array of TES microcalorimeters was fabricated and tested. A high energy resolution of 13.0 eV at 6 keV was achieved and the filling factor was improved to 83%. Although several issues still need to be investigated, we verified that our method is useful for fabricating a Ti-Au TES microcalorimeter array.

KW - Array

KW - Calorimeter

KW - Electrodeposition

KW - TES

KW - X-ray spectrometer

UR - http://www.scopus.com/inward/record.url?scp=2442508079&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2442508079&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:2442508079

VL - 43

SP - 1190

EP - 1195

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 3

ER -