High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor

Xuefeng Li, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.

Original languageEnglish
Article number06FL10
JournalJapanese Journal of Applied Physics
Volume51
Issue number6 PART 2
DOIs
Publication statusPublished - 2012 Jun

Fingerprint

Fabry-Perot interferometers
temperature sensors
Temperature sensors
Fiber optics
fiber optics
sensitivity
sensors
Sensors
cavities
punches
fibers
Fibers
Focused ion beams
Finite difference time domain method
Fused silica
finite difference time domain method
Thermal expansion
thermal expansion
standard deviation
strip

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor. / Li, Xuefeng; Lin, Shuo; Liang, Jinxing; Oigawa, Hiroshi; Ueda, Toshitsugu.

In: Japanese Journal of Applied Physics, Vol. 51, No. 6 PART 2, 06FL10, 06.2012.

Research output: Contribution to journalArticle

Li, Xuefeng ; Lin, Shuo ; Liang, Jinxing ; Oigawa, Hiroshi ; Ueda, Toshitsugu. / High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor. In: Japanese Journal of Applied Physics. 2012 ; Vol. 51, No. 6 PART 2.
@article{28fda8cac46d441baff2e5d3b128b74d,
title = "High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor",
abstract = "A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.",
author = "Xuefeng Li and Shuo Lin and Jinxing Liang and Hiroshi Oigawa and Toshitsugu Ueda",
year = "2012",
month = "6",
doi = "10.1143/JJAP.51.06FL10",
language = "English",
volume = "51",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "6 PART 2",

}

TY - JOUR

T1 - High-sensitivity fiber-optic Fabry-Perot interferometer temperature sensor

AU - Li, Xuefeng

AU - Lin, Shuo

AU - Liang, Jinxing

AU - Oigawa, Hiroshi

AU - Ueda, Toshitsugu

PY - 2012/6

Y1 - 2012/6

N2 - A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.

AB - A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional singlemode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/°C in the 0 to +60 °C range. The standard deviation of temperature is less than 0.15 °C in 1h.

UR - http://www.scopus.com/inward/record.url?scp=84863304661&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863304661&partnerID=8YFLogxK

U2 - 10.1143/JJAP.51.06FL10

DO - 10.1143/JJAP.51.06FL10

M3 - Article

VL - 51

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 6 PART 2

M1 - 06FL10

ER -