High spatial resolution EO probe using a micro-balance

T. Sugiyama, H. Hayashi, T. Ueda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A Pt stylus formed at the tip of the electrooptic (EO) probe by a focused ion beam achieves high spatial resolution. The microbalance mechanism fabricated by etching quartz crystal was employed to stabilize the probe position and to minimize the force exerted upon ICs during probe positioning. The sine wave signal was applied to the 0.84 μm wide strip line and measured by the EO probes with and without Pt stylus. The signal is not detected with an EO probe without Pt stylus, while EO probe with Pt stylus measures it with a good S/N ratio since it has a higher spatial resolution.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages38-39
Number of pages2
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim - Chiba, Jpn
Duration: 1997 Jul 141997 Jul 18

Other

OtherProceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim
CityChiba, Jpn
Period97/7/1497/7/18

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Sugiyama, T., Hayashi, H., & Ueda, T. (1997). High spatial resolution EO probe using a micro-balance. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (pp. 38-39). IEEE.