High Tc/high coupling perovskite thin films

K. Wasa, T. Matsushima, H. Adachi, T. Matsunaga, T. Yanagitani, T. Yamamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Ferroelectric thin films with high Curie temperature Tc and high piezoelectric coupling factor k are fascinated for a better piezoelectric MEMS. Pb(Zr, Ti)O3 (PZT)-based ferroelectric ceramics exhibit high piezoelectricity, but the Tc is not high, i.e. Tc <400°C. PZT-based piezoelectric thin films with higher Tc will be much useful. Based on a strain engineering, it is commonly understood the in-plane biaxial strain enhances the Tc of PZT thin films in a laminated composite structure. However, thickness of the PZT thin films is limited below a critical thickness typically < 50nm. Recently it has been found in-plane relaxed single crystal PZT-based thin films, i.e. PMnN-PZT(48/52) thin films, thickness above the critical thickness (typically 1μm), exhibited enhanced Tc The Tc is extraordinary high, Tc = 600°C. Their ferroelectric performances are beyond bulk PZT. The high Tc phenomena are demonstrated and the possible mechanisms of the high Tc behavior are discussed.

Original languageEnglish
Title of host publication2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479938605
DOIs
Publication statusPublished - 2014 Oct 13
Event2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014 - State College, United States
Duration: 2014 May 122014 May 16

Publication series

Name2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014

Other

Other2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014
CountryUnited States
CityState College
Period14/5/1214/5/16

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Keywords

  • PMnN-PZT thin films
  • high Curie temperature
  • high piezoelectric coupling
  • sputtered heteroepitaxial thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Wasa, K., Matsushima, T., Adachi, H., Matsunaga, T., Yanagitani, T., & Yamamoto, T. (2014). High Tc/high coupling perovskite thin films. In 2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014 [6923017] (2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISAF.2014.6923017