Highly (0001)-oriented Al-doped ZnO polycrystalline films on amorphous glass substrates

Junichi Nomoto, Katsuhiko Inaba, Minoru Osada, Shintaro Kobayashi, Hisao Makino, Tetsuya Yamamoto

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Very thin aluminum-doped zinc oxide (AZO) films with a well-defined (0001) orientation and a surface roughness of 0.357 nm were deposited on amorphous glass substrates at a temperature of 200 °C by radio frequency magnetron sputtering, which are promising, particularly in terms of orientation evolution, surface roughness, and carrier transport, as buffer layers for the subsequent deposition of highly (0001)-oriented AZO polycrystalline films of 490 nm thickness by direct current (DC) magnetron sputtering. Sintered AZO targets with an Al2O3 content of 2.0 wt. % were used. DC magnetron sputtered AZO films on bare glass substrates showed a mixed (0001) and the others crystallographic orientation, and exhibited a high contribution of grain boundary scattering to carrier transport, resulting in reduced Hall mobility. Optimizing the thickness of the AZO buffer layers to 10 nm led to highly (0001)-oriented bulk AZO films with a marked reduction in the above contribution, resulting in AZO films with improved Hall mobility together with enhanced carrier concentration. The surface morphology and point defect density were also improved by applying the buffer layers, as shown by atomic force microscopy and Raman spectroscopy, respectively.

Original languageEnglish
Article number125302
JournalJournal of Applied Physics
Volume120
Issue number12
DOIs
Publication statusPublished - 2016 Sep 28
Externally publishedYes

Fingerprint

zinc oxides
aluminum
oxide films
glass
buffers
magnetron sputtering
surface roughness
direct current
point defects
radio frequencies
grain boundaries
Raman spectroscopy
atomic force microscopy
defects
scattering
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Nomoto, J., Inaba, K., Osada, M., Kobayashi, S., Makino, H., & Yamamoto, T. (2016). Highly (0001)-oriented Al-doped ZnO polycrystalline films on amorphous glass substrates. Journal of Applied Physics, 120(12), [125302]. https://doi.org/10.1063/1.4962943

Highly (0001)-oriented Al-doped ZnO polycrystalline films on amorphous glass substrates. / Nomoto, Junichi; Inaba, Katsuhiko; Osada, Minoru; Kobayashi, Shintaro; Makino, Hisao; Yamamoto, Tetsuya.

In: Journal of Applied Physics, Vol. 120, No. 12, 125302, 28.09.2016.

Research output: Contribution to journalArticle

Nomoto, J, Inaba, K, Osada, M, Kobayashi, S, Makino, H & Yamamoto, T 2016, 'Highly (0001)-oriented Al-doped ZnO polycrystalline films on amorphous glass substrates', Journal of Applied Physics, vol. 120, no. 12, 125302. https://doi.org/10.1063/1.4962943
Nomoto, Junichi ; Inaba, Katsuhiko ; Osada, Minoru ; Kobayashi, Shintaro ; Makino, Hisao ; Yamamoto, Tetsuya. / Highly (0001)-oriented Al-doped ZnO polycrystalline films on amorphous glass substrates. In: Journal of Applied Physics. 2016 ; Vol. 120, No. 12.
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